Differential capacitive sensing circuit for a multi-electrode capacitive force sensor-Reference-Cited by-同舟云学术

Differential capacitive sensing circuit for a multi-electrode capacitive force sensor

Published:2015-10 Issue: Volume:234 Page:168-179
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Brookhuis R.A.,Lammerink T.S.J.,Wiegerink R.J.

Funder

Dutch technology foundation STW

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference46 articles.

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2. Micromachined inertial sensors;Yazdi;Proc. IEEE,1998

3. Precision readout circuits for capacitive microaccelerometers;Yazdi,2004

4. Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer;Lötters;Sens. Actuators A: Phys.,1998

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