Author:
Dubois Marc-Alexandre,Muralt Paul
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. K.R. Udayakumar, S.F. Bart, A.M. Flynn, J. Chen, L.S. Tavrow, L.E. Cross, R.A. Brooks, D.J. Ehrlich, Ferroelectric thin film ultrasonic micromotors, IEEE-MEMS, Nara, Japan (1991) 109–113.
2. Piezoelectric micromotors for microrobots;Flynn;J. Microelectromech. Syst.,1992
3. PZT thin film actuated elastic fin micromotor;Dubois;IEEE Trans. Ultrason., Ferroelect., Freq. Contr.,1998
4. Ultrasonic flexural Lamb-wave actuators based on PZT thin films;Lugienbuhl;Sensors and Actuators A,1997
5. Force sensing microcantilever using sputtered zinc oxide thin film;Itoh;Appl. Phys. Lett.,1994
Cited by
257 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献