RASTA—real-acceleration-for-self-test accelerometer: a new concept for self-testing accelerometers

Author:

Puers R.,Reyntjens S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Integrating testability into microsystems;Olbrich;Microsyst. Technol.,1997

2. Accelerometer systems with self-testable features;Allen;Sensors Actuators,1989

3. L. Ristic, R. Gutteridge, J. Kung, D. Koury, B. Dunn, H. Zunino, A capacitive type accelerometer with self-test feature based on a double-pinned polysilicon structure, Proc. Transducers’93, Yokohama, pp. 810–813, 1993.

4. Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability;Zimmermann;Sensors Actuators,1989

5. F. Pourahmadi, L. Christel, K. Petersen, Silicon accelerometer with new thermal self-test mechanism, Proc. 1992 IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, 1992, pp. 122–125.

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