Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/ab3b17/pdf
Reference31 articles.
1. A Large-Area High-Reflectivity Broadband Monolithic Single-Crystal-Silicon Photonic Crystal Mirror MEMS Scanner With Low Dependence on Incident Angle and Polarization
2. Integration design of a MEMS based fuze
3. A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film
4. Micro-technology for positioning, navigation, and timing towards PNT everywhere and always
5. A piezo-driven 2-DOF compliant micropositioning stage with remote center of motion
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