Author:
Yamaguchi Yoh-ichi,Nagasawa Hiroyuki,Shoki Tsutomu,Annaka Norimichi,Mitsui Hideaki
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Atomic level epitaxy of 3C-SiC by low pressure chemical vapor deposition with alternating gas supply;Nagasawa;Thin Solid Films,1993
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