Polysilicon optical microscanners for laser scanning displays-Reference-Cited by-同舟云学术

Polysilicon optical microscanners for laser scanning displays

Published:1998-10 Issue:1-2 Volume:70 Page:195-199
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kiang Meng-Hsiung,Solgaard Olav,Lau Kam Y.,Muller Richard S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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5. Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor;Ikeda;Transducers '95,1995

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