Polysilicon optical microscanners for laser scanning displays

Author:

Kiang Meng-Hsiung,Solgaard Olav,Lau Kam Y.,Muller Richard S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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2. Silicon as a mechanical material;Peterson,1982

3. Projection displays and MEMS: timely convergence for a bright future;Hornbeck,1995

4. Fabrication of a mechanical anti-reflection switch for fiber to the home system;Walker;IEEE J. Micro-electromech. Syst.,1996

5. Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor;Ikeda;Transducers '95,1995

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