Author:
Schröpfer Gerold,Elflein Wilhelm,de Labachelerie Michel,Porte Henri,Ballandras Sylvain
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Collective wet etching of a 3D monolithic silicon seismic mass system;Schröpfer,1997
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