In-plane degree of freedom optical waveguide displacement sensors based on geometrical modulation-Reference-Cited by-同舟云学术

In-plane degree of freedom optical waveguide displacement sensors based on geometrical modulation

Published:1998-09 Issue:3 Volume:69 Page:217-225
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Haronian Dan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates;Eng;Sensors and Actuators A,1995

2. Micromechanically based integrated optic modulators and switches;Kim;SPIE,1992

3. Micromachined silicon cantilever beam accelerometer incorporating an integrated optical waveguide;Burcham;SPIE,1992

4. Integrated optical sensors using micromechanical bridges and cantilevers;Wu;SPIE,1992

5. IC compatible optomechanical pressure sensors using Mach—Zehnder interferometery;Benaissa;IEEE Trans. Electron Devices,1996

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. MEMS actuators and sensors: observations on their performance and selection for purpose;Journal of Micromechanics and Microengineering;2005-06-20

2. Bottlenecks of opto-MEMS;Micro-Opto-Electro-Mechanical Systems;2000-09-01

3. Comparative study of novel micromachined accelerometers employing MIDOS;Sensors and Actuators A: Physical;2000-03

4. Comparative study of novel micromachined accelerometers employing MIDOS;Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291);1999

5. Displacement sensing using geometrical modulation in reflection mode (GM-RM) of coupled optical waveguides;Journal of Micromechanics and Microengineering;1998-12-01