Use of a shock tube in investigations of silicon micromachined piezoresistive pressure sensors-Reference-Cited by-同舟云学术

Use of a shock tube in investigations of silicon micromachined piezoresistive pressure sensors

Published:2000-10 Issue:1-2 Volume:86 Page:58-65
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Stankevič V,Šimkevičius Č

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. A new sputtered amorphous thin film pressure transducer;Huang;Sensors and Actuators,1989

2. ENDEVCO. General catalog, 1997.

3. Means of dynamic calibration for pressure transducers;Damion;Metrologia,1994

4. Silicon fusion bonding for fabrication of sensors, actuators and microstructures;Barth;Sensors and Actuators, A,1990

5. Theory of Plates and Shells;Timoshenko,1983

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