Author:
Ohji H,French P.J,Izuo S,Tsutsumi K
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Fabrication of accelerometer using single-step electrochemical etching for microstructures (SEMMS);Ohji,1999
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