Atomic force microscopy investigation of surface roughness generated between SiO2 micro-pits in CHF3/Ar plasma-Reference-Cited by-同舟云学术

Atomic force microscopy investigation of surface roughness generated between SiO2 micro-pits in CHF3/Ar plasma

Published:2012-05 Issue:5 Volume:51 Page:597-605
ISSN:0749-6036
Container-title:Superlattices and Microstructures
language:en
Short-container-title:Superlattices and Microstructures

Author:

Rad Maryam Alsadat,Ibrahim Kamarulazizi,Mohamed Khairudin

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference24 articles.

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