Polysilicon process development for fully integrated surfacemicromachined accelerometer with CMOS electronics-Reference-Cited by-同舟云学术

Polysilicon process development for fully integrated surfacemicromachined accelerometer with CMOS electronics

Published:1998-06 Issue:1-3 Volume:68 Page:238-243
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

King D.O.,Ward M.C.L.,Brunson K.M.,Hamilton D.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Surface micromachining;Linder;J Micromech. Microeng,1992

2. Silicon as a mechanical material;Petersen,1982

3. Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry;Yun,1992

4. Stress in polycrystalline and amorphous silicon thin films;Howe;J. Appl. Phys.,1983

5. Comb actuators for xy-microstages;Jaecklin;Sensors and Actuators A,1993

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Establishing a MOEMS process to realise microshutters for coded aperture imaging applications;SPIE Proceedings;2011-09-08

2. Large area transmissive modulator for a remotely interrogated MEMS-based optical tag;SPIE Proceedings;2009-02-12

3. Reconfigurable mask for adaptive coded aperture imaging (ACAI) based on an addressable MOEMS microshutter array;SPIE Proceedings;2007-09-13

4. A resonant method for determining mechanical properties of Si3N4 and SiO2 thin films;Materials Letters;2007-06

5. Z-axis Capacitive Accelerometer with novel beams using SOG Structure;2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems;2006-01