Optimizing capacity allocation in semiconductor manufacturing photolithography area – Case study: Robert Bosch-Reference-Cited by-同舟云学术

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Optimizing capacity allocation in semiconductor manufacturing photolithography area – Case study: Robert Bosch

Published:2020-01 Issue: Volume:54 Page:123-137
ISSN:0278-6125
Container-title:Journal of Manufacturing Systems
language:en
Short-container-title:Journal of Manufacturing Systems

Author:

Ghasemi Amir,Azzouz Radhia,Laipple Georg,Kabak Kamil Erkan,Heavey Cathal

Funder

Electronic Component Systems for European Leadership Joint Undertaking

Science Foundation Ireland

European Regional Development Fund

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Hardware and Architecture,Software,Control and Systems Engineering

Reference43 articles.

1. Cycle-time improvements for photolithography process in semiconductor manufacturing;Akçalı;IEEE Trans Semicond Manuf,2001

2. A sequential solution methodology for capacity allocation and lot scheduling problems for photolithography;Akçalı;Twenty Sixth IEEE/CPMT International Electronics Manufacturing Technology Symposium (Cat. No. 00CH37146),2000

3. Genetic algorithms and random keys for sequencing and optimization;Bean;ORSA J Comput,1994

4. Supply chain scheduling and routing in multi-site manufacturing system (case study: a drug manufacturing company);Beheshtinia;J Model Manage,2017

5. Tool capacity planning in semiconductor manufacturing;Çatay;Comput Oper Res,2003

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