Micromechanical BEoL robustness evaluation methods enabling loading condition customization and acoustic emission damage monitoring

Author:

Silomon Jendrik,Chimeg Dulguun,Clausner André,Zschech Ehrenfried

Publisher

Elsevier BV

Subject

Medical Laboratory Technology,Clinical Biochemistry

Reference14 articles.

1. Experimental analyses of the mechanical reliability of advanced BEOL/fBEOL stacks regarding CPI loading;Geisler,2013

2. Advanced chip package interaction qualification for critical stacks in combi- nation with Cu pillar interconnect technology;Boehme,2016

3. Qualification of bumping processes: experimental and numerical investigations on mechanical stress and failure modes induced by shear test;Gallois;Microelectron. Reliab.,2015

4. JEDEC Standard JESD22-B117B, JEDEC solid state technology association, May 2014

5. BEoL stack robustness investigations utilizing Cu pillar immobilization and micromechanical loading methods;Silomon;Microelectron. Reliab.,2022

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Mechanical BEoL Robustness Evaluation Using Variable Loading Strategies and Acoustic Emission Damage Monitoring;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

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