Effects of argon and oxygen addition to the CH4-H2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition-Reference-Cited by-同舟云学术

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Effects of argon and oxygen addition to the CH4-H2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition

Published:1997-11 Issue:1-2 Volume:310 Page:39-46
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Han Young-Soo,Kim Yoon-Kee,Lee Jai-Young

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Capacitance-voltage measurements on metal-SiO/sub 2/-diamond structures fabricated with

2. Diamond Films and Coatings: Development, Properties and Applications,1993

3. Synthetic Diamond: Emerging CVD Science and Technology,1994

4. Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond films

5. Graphite formation in diamond film deposition

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