Author:
Defranoux Christophe,Piel Jean-Philippe,Stehle Jean-Louis
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference5 articles.
1. To dye or not to dye - some aspects of today's resist technology -
2. P. Boher, J.L. Stehle, J.P. Piel, C. Defranoux, L. Hennet, Proc. Soc. Photo-Opt. Instrum. Eng. (1997) in press.
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