Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties-Reference-Cited by-同舟云学术

Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties

Published:1997-10 Issue: Volume:308-309 Page:31-37
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Urban III F.K.,Barton D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, New York, 1977.

2. I. An and R.W. Collins, Rev. Sci. Instrum., 62 (1991) 1904.

3. Matlab, High-Performance Numeric Computation and Visualization Software, Reference Guide, The MathWorks, Inc., Natick, MA.

4. F.K. Urban III and J.C. Comfort, Thin Solid Films, 253 (19??) 262.

5. W.H. Press, B.P. Flannery, S.A. Teukolsky and W.T. Vetterling, Numerical Recipes the Art of Scientific Computing, Cambridge University Press, New York, 1990.

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