Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method
Author:
Affiliation:
1. GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstr. 101, D-01109 Dresden, Germany
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5126074
Reference43 articles.
1. Spectroscopic Ellipsometry
2. Implementation and evaluation of nonparametric regression procedures for sensitivity analysis of computationally demanding models
3. Sensitivity of variable angle spectroscopic ellipsometry to isotropic thin film properties
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