Plasma chemistry model of DC magnetron reactive sputtering in Ar O2 gas mixtures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Model of d.c. magnetron reactive sputtering in ArO2 gas mixtures
2. Study of an argon magnetron discharge used for molybdenum sputtering. I. Collisional radiative model
3. Study of an argon magnetron discharge used for molybdenum sputtering. II. Spectroscopic analysis and comparison with the model
4. Optical diagnostics of d.c. and r.f. argon magnetron discharges
5. Updated Excitation and Ionization Cross Sections for Electron Impact on Atomic Oxygen
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