Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers-Reference-Cited by-同舟云学术

Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers

Published:1998-03 Issue:1-2 Volume:315 Page:170-178
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Rajan Narayanan,Zorman Christian A,Mehregany Mehran,DeAnna Russell,Harvey Rex

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. High‐voltage 6H‐SiCp‐njunction diodes

2. A. Singh, M. Mehregany, S.M. Phillips, R. Harvey, M. Benjamin, Micromachined silicon fuel atomizers for gas turbine engines, Proceedings of the 9th Annual International Workshop on MEMS, San Diego, CA, p. 473, 1996.

3. Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition

4. M. Kitabatake, Single phase 3C-SiC(001)/Si(001) growth by surface-controlled epitaxy, Silicon Carbide and Related Materials—1995, IOP Publishing, Bristol, 1996, p. 113.

5. Growth and Characterization of Cubic SiC Single‐Crystal Films on Si

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