Author:
Bhan Mohan K,Huang Judy,Cheung David
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. K. Suguro, H. Shibata, Proceedings of Advanced Metallization for ULSI Applications, (1994) 23.
2. S.P Murarka, Solid State Techonolgy, March (1996) 83.
3. T. Usami, K. Shimokawa, M. Yoshimam, Jpn. J. Appl. Phys., 331 (1994) 408.
4. S. Mizuno, A. Verma, H. Tran, P. Lee, B. Nguyen, Thin Solid Films, 283 (1996) 30.
5. M.J. Shapiro, S. Nguyen, T. Matsuda, C. Parks, D. Dozinsky, SEMI, (1995) 17.
Cited by
43 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献