Author:
Iwata K.,Sakemi T.,Yamada A.,Fons P.,Awai K.,Yamamoto T.,Matsubara M.,Tampo H.,Niki S.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Vacuum coating with a hollow cathode source
2. M. Tanaka, U.S. Patent 5677012 (1997)
Cited by
49 articles.
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