Vacuum coating with a hollow cathode source
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Published:1974-01
Issue:1
Volume:11
Page:374-376
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Williams Duane G.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
28 articles.
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1. Thermal Evaporation and Deposition in Vacuum;The Foundations of Vacuum Coating Technology;2018
2. The use of hollow cathodes in deposition processes: A critical review;Thin Solid Films;2015-03
3. Mechanical Properties of Soft-Interlayer Solid-State Welds[1];Welding Fundamentals and Processes;2011
4. Plasmas in Deposition Processes;Handbook of Deposition Technologies for Films and Coatings;2010
5. Nonambipolar electron source;Review of Scientific Instruments;2006-11