High temperature cracking of tungsten polycide films on quartz substrate-Reference-Cited by-同舟云学术

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High temperature cracking of tungsten polycide films on quartz substrate

Published:2000-07 Issue:1-2 Volume:370 Page:307-310
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Lee Jaegab,Oh Sang-Hun,Lee Jongmu,Lee Eungu,Lim Ingon,Park Won-Kyu,Kim Geunho

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Extended Abstracts of the 1993 International Conference on Solid State Devices and Materials, Chiba, Japan, August 29–September 1;Fukushima,1993

2. Digest;Kobayashi;San Jose, CA, June,1994

3. Proceedings of the Seven International VMIC;Jain;June,1990

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