Density functional study of silane adsorption onto Si(100) surface
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface
2. Reactive sticking coefficient of silane on the Si(111)-(7×7) Surface
3. Decomposition mechanisms of SiHx species on Si(100)‐(2×1) for x=2, 3, and 4
4. Decomposition of silane on Si(111)‐(7×7) and Si(100)‐(2×1) surfaces below 500 °C
5. Surface reactions in Si chemical vapor deposition from silane
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