Full field measurements of curvature using coherent gradient sensing: application to thin film characterization-Reference-Cited by-同舟云学术

Full field measurements of curvature using coherent gradient sensing: application to thin film characterization

Published:1998-07 Issue:1-2 Volume:325 Page:42-54
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Rosakis A.J,Singh R.P,Tsuji Y,Kolawa E,Moore N.R

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference41 articles.

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5. P.S. Ho, C.-Y. Li, P. Totta, (eds.), Stress Induced Phenomena in Metallization, AIP Conference Proceedings, 1993, p. 305.

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