Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode-Reference-Cited by-同舟云学术

Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode

Published:1998-11 Issue:1-2 Volume:332 Page:215-219
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Goschnick J,Natzeck C,Sommer M,Zudock F

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. H.Oechsner, in: H. Oechsner (Ed.), Thin Films and Depth Profile Analysis, Vol. 34, Springer, New York, 1984, pp. 148–218.

2. H.H.Anderson, H.L. Bay, in: R. Behrisch (Ed.), Sputtering by Particle Bombardment I. Topics in Applied Physics, Vol. 47, Springer, New York, 1981.

3. J. Goschnick, J. Schuricht, M. Sommer, in: G. Gillen, R. Lareau, J. Bennet, F. Stevie (Eds.), Calibration of Depth Profiles of Environmental Material Obtained with Plasma-Based SNMS, SIMS XI, Wiley, New York, 1997.

4. F. Zudock, J. Goschnick, M. Bruns, H.J. Ache, in: I. Olefjord, L. Nyborg, D. Briggs (Eds.), Depth-Profiling of Triple Layers for Catalytic Tuning of Gas Sensing Devices, ECASIA 97, Wiley, New York, 1997.

5. M. Sommer, Ph.D. Thesis (in German), University of Karlsruhe, 1996.

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