Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si-Reference-Cited by-同舟云学术

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Structural investigation of Si/SiGe superlattices on vicinal (113) oriented Si

Published:1999-12 Issue:1 Volume:357 Page:71-75
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Stangl J.,Holy V.,Grim J.,Bauer G.,Zhu J.,Brunner K.,Abstreiter G.,Kienzle O.,Ernst F.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Step-Bunching Instability of Vicinal Surfaces under Stress

2. Self-Organization of Steps in Growth of Strained Films on Vicinal Substrates

3. Two-dimensional ordering of self-assembled Ge islands on vicinal Si(001) surfaces with regular ripples

4. Observation of step bunches in units of 4 ML on vicinal Si(113) surfaces

5. Oblique roughness replication in strained SiGe/Si multilayers

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The fine structure of X-ray diffuse scattering in the vicinity of high-angle superlattice Bragg reflections;Acta Crystallographica Section A Foundations of Crystallography;2003-10-28

2. Ga-induced nano-facet formation on Si(1 1 n) surfaces;Applied Surface Science;2003-05

3. Surface morphology of Ga adsorbed Si( 113 ) surface;Surface Science;2001-11

4. Inclined inheritance of interface roughness in semiconductor superlattices as characterized by x-ray reciprocal space mapping;Physical Review B;2001-10-17

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