Residual stress in diamond films: origins and modelling-Reference-Cited by-同舟云学术

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Residual stress in diamond films: origins and modelling

Published:1999-12 Issue:2 Volume:357 Page:189-201
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Michler J.,Mermoux M.,von Kaenel Y.,Haouni A.,Lucazeau G.,Blank E.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Stresses and deformation processes in thin films on substrates

2. Stress measurement of CVD diamond films

3. Internal stresses in CVD diamond layers

4. Stress distribution in heteroepitaxial chemical vapor deposited diamond films

5. Applications of Diamond Films and Related Materials;Schäfer,1991

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