1. Fraunhofer Institute, Annual Report, Electron Beam and Plasma Technology, 1997, Dresden, Germany.
2. S. Schiller, K. Goedicke, V. Kirchhoff, T. Kopte, Society Vacuum Coaters, 38th Annual Conference Proceedings, p. 293
3. Mid frequency sputtering — a novel tool for large area coating
4. Large-scale antireflective coatings on glass produced by reactive magnetron sputtering
5. T. Oyama, H. Ohsaki, Y. Ogata, S. Watanabe, J. Shimizu, Proc. 3rd ISSP, Tokyo, 1995.