1. Proc. 3rd International Symposium on Sputtering and Plasmas (ISSP '95);Bräuer,1995
2. Society of Vacuum Coaters, Proc. 36th Ann. Techn. Conf.;Scholl,1993
3. Proc. 3rd International Symposium on Sputtering and Plasmas (ISSP '95);Scholl,1995
4. Proc. 3rd International Symposium on Sputtering and Plasmas (ISSP '95);Oyama,1995