Mechanical properties of r.f. magnetron sputtered indium tin oxide films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Effect of oxygen concentration in the sputtering ambient on the microstructure, electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide films
2. Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing
3. Effect of sputtering power on the structural and optical properties of RF magnetron sputtered ITO films
4. Oxygen content of indium tin oxide films fabricated by reactive sputtering
5. Properties of indium tin oxide films prepared by the electron beam evaporation method in relation to characteristics of indium tin oxide/silicon oxide/silicon junction solar cells
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