Author:
Maa Jer-shen,Ulrich Bruce,Teng Hsu Sheng,Stecker Greg
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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4. Control of lateral overgrowth of TiSi2 and CoSi2 films in VLSI circuits
5. The C49 to C54 Phase Transformation in TiSi2 Thin Films
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