Transparent conductive ZnO film preparation by alternating sputtering of ZnO:Al and Zn or Al targets-Reference-Cited by-同舟云学术

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Transparent conductive ZnO film preparation by alternating sputtering of ZnO:Al and Zn or Al targets

Published:1998-12 Issue:1-2 Volume:334 Page:35-39
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Tominaga K,Umezu N,Mori I,Ushiro T,Moriga T,Nakabayashi I

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis

2. Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

3. Properties of transparent, conducting ZnO films deposited by reactive bias sputtering

4. Substrate Temperature Dependence of Transparent Conducting Al-Doped ZnO Thin Films Prepared by Magnetron Sputtering

5. Properties of transparent conducting oxides formed from CdO and ZnO alloyed with SnO2 and In2O3

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3. Effect of Al Doping on the Properties of ZnO Nanorods Synthesized by Hydrothermal Growth for Gas Sensor Applications;Korean Journal of Materials Research;2020-08-31

4. Electrical resistivity reduction and spatial homogenization of Ga-doped ZnO film by Zn layer insertion;Thin Solid Films;2020-08

5. Al-Doping of ZnO Thin Films Deposited by Spray Pyrolysis;Russian Journal of Inorganic Chemistry;2020-06

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