Electrical resistivity reduction and spatial homogenization of Ga-doped ZnO film by Zn layer insertion-Reference-Cited by-同舟云学术

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Electrical resistivity reduction and spatial homogenization of Ga-doped ZnO film by Zn layer insertion

Published:2020-08 Issue: Volume:707 Page:138069
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Yamada Yasuji,Sancakoglu Orkut,Sugiura Rei,Shoriki Motonari,Funaki Shuhei

Funder

Science and Technology Research Council of Turkey

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference48 articles.

1. E. Klaus, Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties, J. Phys. D, 33 (2000) R17.

2. Resistivity of polycrystalline zinc oxide films: current status and physical limit;Ellmer;J. Phys. D,2001

3. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semiconductor Sci. Technol.,2005

4. Effect of applied external magnetic field on the relationship between the arrangement of the substrate and the resistivity of aluminium-doped ZnO thin films prepared by r.f. magnetron sputtering;Minami;Thin Solid Films,1988

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improved sputtering method to deposit high conducting doped ZnO films without substrate heating;Applied Physics Express;2023-10-01

2. Sol–gel deposition of Al-doped ZnO thin films: effect of additional zinc supply;Journal of Sol-Gel Science and Technology;2023-07-08

3. Growth of Single-Crystalline ZnO Films on 18%-Lattice-Mismatched Sapphire Substrates Using Buffer Layers with Three-Dimensional Islands;Crystal Growth & Design;2022-05-16

4. Study on Direct Writing of Gallium Metal for the Flexible Sensor;Advances in Materials Science and Engineering;2021-10-06

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