Hot-wire deposition of photonic-grade amorphous silicon-Reference-Cited by-同舟云学术

Hot-wire deposition of photonic-grade amorphous silicon

Published:2001-09 Issue:1-2 Volume:395 Page:142-146
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Fortmann C.M,Jaen E.L,Hata N,Anderson W.A,Mahan A.H

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Investigation of microvoids in PECVD a-Si:H;Manfredotti;Mater. Res. Soc. Symp. Proc.,1993

2. Temperature and growth effects on hydrogen incorporation in a-Si:H;Kessels;J. Non-Cryst. Solids,1998

3. Prospects for 3-D photonic crystals engineered from hydrogenated amorphous silicon;Fortmann,1999

4. C.M. Fortmann, E.L. Jaen, N. Hata, Prospects of amorphous silicon-based photonic networks, in: F.T.S. Yu, S. Yin (Eds.), Photorefractive Fiber and Crystal Devices: Materials, Optical Properties and Applications VI, in press (Proceedings of SPIE vol. 4110).

5. C.M. Fortmann, S. Luryi, R. Tonucci, J.H. Coleman, Fabrication Methods and Structured Materials for Photonic Devices, US Patent 6064511, issued 16 May 2000.

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2. Advances in Amorphous Silicon Integrated Photonics Science and Technology;MRS Proceedings;2005

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4. Hot-wire photonics: materials, science, and technology;Thin Solid Films;2003-04

5. High-speed light-induced photo refractive change in hydrogenated amorphous silicon;SPIE Proceedings;2002-11-01