Advanced indentation technique for strength evaluation of hard thin films
Author:
Affiliation:
1. College of Science and Engineering, Aoyama Gakuin University, Fuchinobe, Sagamihara, Kanagawa, 229-8558, Japan
Publisher
Informa UK Limited
Subject
General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1016/j.stam.2005.11.009
Reference10 articles.
1. Property Evaluation of Vapor Deposited TiN Film by the Analysis of Elastic Waves. 2nd Report. Film Strength Estimated by AE Source Inversion during Compressive Loading.
2. Fracture Mechanism Analysis and Strength Evaluation of Ceramic Thin Film during Indentation Testing
3. Hybrid Method for the Evaluation of Mechanical Properties of Hard Film Deposited on Soft Substrate
4. A Grounding in Electrochemical Noise Measurement
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