Chemistry of Amorphous Silicon Deposition Processes
Author:
Publisher
Elsevier
Reference215 articles.
1. The preparation ofinsitudoped hydrogenated amorphous silicon by homogeneous chemical vapor deposition
2. Initial steps in the photochemical vapour deposition of amorphous silicon
3. The Preparation and Properties of Amorphous Silicon
4. Substitutional doping of amorphous silicon
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