Author:
Scheer Hella-C.,Schulz Hubert,Hoffmann Thomas,M. Sotomayor Torres Clivia
Cited by
8 articles.
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1. Nanostrukturierung;Nanotechnologie und Nanoprozesse;2016-05-13
2. Direct Nanoimprinting for Micro- and Nanosystems;Bio and Nano Packaging Techniques for Electron Devices;2012
3. Thermo-curable epoxy systems for nanoimprint lithography;Journal of Micromechanics and Microengineering;2009-11-20
4. Viscosity data from thermal imprint experiments;Microelectronic Engineering;2009-04
5. Issues and Requirements of Polymers for Thermal NIL;Journal of Photopolymer Science and Technology;2007