Templated self-organization of SiGe quantum structures for nanoelectronics
Author:
Publisher
Elsevier BV
Subject
Biomaterials,Bioengineering,Mechanics of Materials
Reference26 articles.
1. A spacer patterning technology for nanoscale CMOS
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1. Groups of Ge nanoislands grown outside pits on pit-patterned Si substrates;Journal of Crystal Growth;2022-09
2. Orientational competition in quantum dot growth in Si–Ge heteroepitaxy on pit-patterned Si(001) substrates;Physical Chemistry Chemical Physics;2020
3. Structural properties of templated Ge quantum dot arrays: impact of growth and pre-pattern parameters;Nanotechnology;2018-05-08
4. Site-selection of Si1−xGex quantum dots on patterned Si(001) substrates;Applied Physics Letters;2016-11-07
5. Achromatic Talbot lithography with partially coherent extreme ultraviolet radiation: process window analysis;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-10-17
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