Author:
Engström C,Berlind T,Birch J,Hultman L,Ivanov I.P,Kirkpatrick S.R,Rohde S
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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4. Unbalanced dc magnetrons as sources of high ion fluxes
5. Unbalanced magnetron ion‐assisted deposition and property modification of thin films
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