In situ deposition of sputtered PZT films: control of the growth temperature by the sputtered lead flux
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Ferroelectric Memories
2. Preparation ofc‐axis oriented PbTiO3thin films and their crystallographic, dielectric, and pyroelectric properties
3. Fabrication and characterization of PZT thin-film vibrators for micromotors
4. Substrate and temperature effects in lead zirconate titanate films produced by facing targets sputtering
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1. Magnetron Sputtered Lead Titanates Thin Films for Pyroelectric Applications: Part 1: Epitaxial Growth, Material Characterization;Materials;2023-12-30
2. Structural, Morphologic, and Ferroelectric Properties of PZT Films Deposited through Layer-by-Layer Reactive DC Magnetron Sputtering;Coatings;2022-05-24
3. Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings;Coatings;2021-08-07
4. Combinatorial study of the phase development of sputtered Pb(Zr,Ti)O3 films;Japanese Journal of Applied Physics;2020-09-17
5. Strongly (001) Oriented Bimorph PZT Film on Metal Foils Grown by rf ‐Sputtering for Wrist‐Worn Piezoelectric Energy Harvesters;Advanced Functional Materials;2018-07-20
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