Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays-Reference-Cited by-同舟云学术

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Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays

Published:2002-08 Issue:3-4 Volume:66 Page:473-478
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Suchaneck G,Lin W.-M,Koehler R,Sandner T,Gerlach G,Krawietz R,Pompe W,Deineka A,Jastrabik L

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference21 articles.

1. Deposition of self-polarized PZT films by planar multi-target sputtering

2. Self-polarization and texture of wet chemically derived lead zirconate titanate thin films

3. Spontaneous pyro- and piezoelectricity of sol-gel La-modified lead titanate thin films

4. Suchaneck G, Gerlach G, Poplavko Yu, Kosarev AI, Andronov AN. MRS Fall Meeting, SymposiumCC, Boston, 2001, MRS Symposium Proceedings. vol. 655, Pittsburgh: MRS, 2001.

5. Investigation of the spatial polarization distribution of sputtered PZT thin films using limm

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