Deposition of self-polarized PZT films by planar multi-target sputtering-Reference-Cited by-同舟云学术

Deposition of self-polarized PZT films by planar multi-target sputtering

Published:1997-01 Issue:1-4 Volume:14 Page:141-149
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Bruchhaus Rainer¹,Pitzer Dana¹,Primig Robert¹,Wersing Wolfram¹,Xu Yuqing¹²

Affiliation:

1. a SIEMENS AG , ZFE T MR 2, D-81730 , Munich , Germany

2. b Zhejiang University , Hangzhou , 310027 , P. R. China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589708019986

Reference6 articles.

1. Pyroelectric infrared array sensors made of c-axis-oriented La-modified PbTiO3 thin films

2. Surface‐micromachined PbTiO3pyroelectric detectors

3. Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

4. Bruchhaus , R. Huber , H. Pitzer , D. and Wersing , W. 1994. Proceedings of the Electroceramics IV. 1994, Aachen. Edited by: Waser , R. pp.221–226.

5. Spierings , G. A.C.M. Dormans , G. J.M. Moors , W. G.J. Ulenaers , M. J.E. and Larsen , P. K. Proc. of the 9th IEEE International Symp. on App. of Feroelectrics. Edited by: Pandey , R. K. Liu , M. and Safari , A. pp.29–32. IEEE.

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