Plasma diagnostic of an RF magnetron Ar/N2 discharge
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Deposition of c-BN films by DC magnetron sputtering
2. Growth of low-stress cubic boron nitride films by simultaneous medium-energy ion implantation
3. Investigation of the nucleation layer in c-BN film growth
4. Review of advances in cubic boron nitride film synthesis
5. Low temperature plasma physics;Hoppler,2001
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