Effect of rapid thermal annealing on the structure of ion beam synthesized β-FeSi2
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Mesotaxy: Single‐crystal growth of buried CoSi2layers
2. Optical absorption study of ion beam synthesized polycrystalline semiconducting FeSi2
3. Ion beam synthesis of buried α‐FeSi2and β‐FeSi2layers
4. Defects Due to Metal Silicide Precipitation in Microelectronic Device Manufacturing: The Unlovely Face of Transition Metal Silicides
5. Structural and optical analysis ofβ−FeSi2thin layers prepared by ion-beam synthesis and solid-state reaction
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electron microscopy study of ion beam synthesized β-FeSi2;Journal of Materials Science;2006-12-17
2. Structural and optical characterization of the formation of β-FeSi2nanocrystallites in an n-type (100) Si matrix;Nanotechnology;2006-03-15
3. Grazing incident asymmetric X-ray diffraction of β-FeSi2 layers, produced by ion beam synthesis;Vacuum;2004-11
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