Preparation of boron–carbon–nitrogen thin films by magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference14 articles.
1. Kouvetakis J, Kaner RB, Sattler ML, Bartlett N. J Chem Soc Chem Commun 1986; 1758.
2. Boron-carbon-nitrogen materials of graphite-like structure
3. Electrical properties of BC2N thin films prepared by chemical vapor deposition
4. Turbostratic boron carbonitride film and its field-emitting behavior
5. Surface composition of BN, CN, and BCN thin films
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3. Structural and optical properties of boron-doped amorphous carbon nitride thin films synthesized by microwave electron cyclotron resonance-plasma chemical vapor deposition;Japanese Journal of Applied Physics;2014-06-19
4. Microstructure and tribological properties of ternary BCN thin films with different carbon contents;Diamond and Related Materials;2010-10
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