Plasma etch models based on different plasma chemistry for micro-electro-mechanical-systems application
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference22 articles.
1. Silicon as a mechanical material
2. Micromechanics: A silicon microfabrication technology
3. A new theory for the anisotropic etching of silicon and some underdeveloped chemical micromachining concepts
4. Etch rates for micromachining processing
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