Understanding the role of fluorine-containing plasma on optical properties of fused silica optics during the combined process of RIE and DCE-Reference-Cited by-同舟云学术

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Understanding the role of fluorine-containing plasma on optical properties of fused silica optics during the combined process of RIE and DCE

Published:2019-07-30 Issue:16 Volume:27 Page:23307
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Shao Ting,Sun Laixi,Li Weihua,Zhou Xiaoyan,Wang Fengrui,Huang Jin,Ye Xin,Yang Liming,Zheng Wanguo

Funder

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference24 articles.

1. Ignition on the National Ignition Facility: a path towards inertial fusion energy

2. The Laser Mega-Joule : LMJ & PETAL status and Program Overview

3. Investigation of surface damage precursor evolutions and laser-induced damage threshold improvement mechanism during Ion beam etching of fused silica

4. Optimizing fused silica polishing processes for 351nm high-power laser application;Neauport,2008

5. Mitigation of organic laser damage precursors from chemical processing of fused silica

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface quality and microstructure evolution in fused silica under SF6/Ar reactive ion beam etching;Journal of Non-Crystalline Solids;2024-10

2. Evolution of physical and mechanical properties of fused silica after subsurface damage layer removal by RIE treatment;Journal of Non-Crystalline Solids;2023-09

3. Enhancing Laser Damage Resistance of Co2+:MgAl2O4 Crystal by Plasma Etching;Applied Sciences;2023-01-14

4. Evolution of Physical and Mechanical Properties of Fused Silica after Subsurface Damage Layer Removal by Rie Treatment;2023

5. Combination of scanning ion beam etching and dynamic chemical etching for improving laser damage resistance of fused silica optics;Optical Materials;2022-12

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