Fundamentals of plasma and sputtering processes
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
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3. Kusano, E., Presented at Int. Vac. Congr., Salamanca, Sept. 1997
4. Some experiments that provide direct visualization of reactive sputtering phenomena
5. Reactive sputtering of Ta under gradient oxygen pressure
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